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SEMI E70-1213 (Reapproved 1021)
SEMI MF673¾ Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy Current Gauge
and SEMI C12
This Test Method covers calculation of the near edge geometry metrics PSFQR and PSFQD
SEMI A1-1020 (technical revision)
G08100 - SEMI G81 - Specification for Map Data Items StdPbc-0815 SEMI E70-1213 (Reapproved 1021)This Document describes the data items that relate to electronic substrate mapping. This Document applies only to substrate map data items. This Document does not address the transmission, file naming conventions, storage or archiving of substrate maps. The Specification of which data items are optional and which are required is not specified in this Document. The size of each data item described in this Document is maximum size. The actual size may
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